7th EUV-FEL Workshop

Monday, 30 January 2023 - 13:00
KEK (Tsukuba Campus - Kobayashi Hall (Kenkyu-Honkan Building))

        : Sessions
    /     : Talks
        : Breaks
30 Jan 2023
AM
PM
13:00
Opening remarks - Sunao Ishihara (Representative of EUV-FEL Light Source Study Group for Industrialization) (until 13:05) ()
13:05
Target of the workshop - Hiroshi Kawata (Secretary of the Workshop) (until 13:10) (Tsukuba Campus - Kobayashi Hall (Kenkyu-Honkan Building))
13:10 Free-electron lasers and the future of EUV lithography - Harry J. Levinson (HJL Lithography)   (Tsukuba Campus - Kobayashi Hall (Kenkyu-Honkan Building))
13:55 Technical issue of EUVL and prospect for EUVL and Beyond EUVL - Takeo Watanabe (University of Hyogo)   (Tsukuba Campus - Kobayashi Hall (Kenkyu-Honkan Building))
14:30 --- Break ---
14:45 Present state of the EUV-FEL light source for future lithography - Norio Nakamura (KEK)   (Tsukuba Campus - Kobayashi Hall (Kenkyu-Honkan Building))
15:20 Current status and prospect of extreme ultraviolet resists - Takahiro Kozawa (Osaka University)   (Tsukuba Campus - Kobayashi Hall (Kenkyu-Honkan Building))
15:55 TEL's Patterning Approaches Toward High NA EUV Lithography - Seiji Nagahara (Tokyo Electron Ltd.)   (Tsukuba Campus - Kobayashi Hall (Kenkyu-Honkan Building))
16:30
Closing address - Shin-ichi Adachi (KEK) (until 16:40) (Tsukuba Campus - Kobayashi Hall (Kenkyu-Honkan Building))