10th EUV-FEL Workshop
Wednesday, 28 January 2026 -
13:10
Monday, 26 January 2026
Tuesday, 27 January 2026
Wednesday, 28 January 2026
13:10
Openning Remarks
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Sunao Ishihara (Representative of EUV-FEL Light Source Study Group for Industrialization) 13:10-13:20
Openning Remarks
Sunao Ishihara (Representative of EUV-FEL Light Source Study Group for Industrialization) 13:10-13:20
13:10 - 13:20
Room: Conference NEXT1
13:20
Greeting
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Akira Henda (MEXT)
Greeting
Akira Henda (MEXT)
13:20 - 13:25
Room: Conference NEXT1
13:25
Target of the workshop
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Hiroshi Kawata (Secretary of the workshop, KEK)
Target of the workshop
Hiroshi Kawata (Secretary of the workshop, KEK)
13:25 - 13:35
Room: Conference NEXT1
13:35
【Key-note Lecture】Development of Next-Generation Semiconductor Process Technologies for EUV and BEUV under Japan’s “K Program” by JST
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Junji Yumoto (The University of Tokyo)
【Key-note Lecture】Development of Next-Generation Semiconductor Process Technologies for EUV and BEUV under Japan’s “K Program” by JST
Junji Yumoto (The University of Tokyo)
13:35 - 14:15
Room: Conference NEXT1
14:15
【Key-note Lecture】Reviving Moore’s Law with an EUV FEL
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Nicholas Kelez (xLight Inc. , CEO & CTO)
【Key-note Lecture】Reviving Moore’s Law with an EUV FEL
Nicholas Kelez (xLight Inc. , CEO & CTO)
14:15 - 14:55
Room: Conference NEXT1
14:55
Break
Break
14:55 - 15:25
Room: Conference NEXT1
15:25
【Invited Talk】The Vast Light Source
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Yosuke Honda (Accelerator Laboratory, KEK)
【Invited Talk】The Vast Light Source
Yosuke Honda (Accelerator Laboratory, KEK)
15:25 - 16:05
Room: Conference NEXT1
16:05
【Invited Talk】Development of Multilayer Mirrors for BEUV Reflective Optics -Current Status of an Ongoing Project-
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Takeo Ejima (Tohoku University)
【Invited Talk】Development of Multilayer Mirrors for BEUV Reflective Optics -Current Status of an Ongoing Project-
Takeo Ejima (Tohoku University)
16:05 - 16:45
Room: Conference NEXT1
16:45
Closing address
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Shoji Asai (Director General, KEK)
Closing address
Shoji Asai (Director General, KEK)
16:45 - 16:50
Room: Conference NEXT1
16:50
Photo-session
Photo-session
16:50 - 16:55
Room: Conference NEXT1
17:30
Networking event
Networking event
17:30 - 19:30
Room: Conference NEXT2