BEGIN:VCALENDAR
VERSION:2.0
PRODID:-//CERN//INDICO//EN
BEGIN:VEVENT
SUMMARY:Study on the soft X-ray FEL light irradiation of resist materials/
 Kazumasa Okamoto（Osaka Univ.）
DTSTART;VALUE=DATE-TIME:20191210T063000Z
DTEND;VALUE=DATE-TIME:20191210T070000Z
DTSTAMP;VALUE=DATE-TIME:20210424T171903Z
UID:indico-contribution-93-1985@conference-indico.kek.jp
DESCRIPTION:https://conference-indico.kek.jp/event/93/contributions/1985/
LOCATION: NEXT1
URL:https://conference-indico.kek.jp/event/93/contributions/1985/
END:VEVENT
BEGIN:VEVENT
SUMMARY:Demonstration of high-repetition FEL using cERL and beyond EUV-FEL
 /Ryukou Kato（KEK）
DTSTART;VALUE=DATE-TIME:20191210T060000Z
DTEND;VALUE=DATE-TIME:20191210T063000Z
DTSTAMP;VALUE=DATE-TIME:20210424T171903Z
UID:indico-contribution-93-1990@conference-indico.kek.jp
DESCRIPTION:https://conference-indico.kek.jp/event/93/contributions/1990/
LOCATION: NEXT1
URL:https://conference-indico.kek.jp/event/93/contributions/1990/
END:VEVENT
BEGIN:VEVENT
SUMMARY:Cost reduction of superconducting rf accelerator and next-generati
 on technology/Shinichiro Michizono（KEK）
DTSTART;VALUE=DATE-TIME:20191210T073000Z
DTEND;VALUE=DATE-TIME:20191210T080000Z
DTSTAMP;VALUE=DATE-TIME:20210424T171903Z
UID:indico-contribution-93-1992@conference-indico.kek.jp
DESCRIPTION:https://conference-indico.kek.jp/event/93/contributions/1992/
LOCATION: NEXT1
URL:https://conference-indico.kek.jp/event/93/contributions/1992/
END:VEVENT
BEGIN:VEVENT
SUMMARY:Leading Edge Short Wavelength Light Source（DUV/EUV） for High V
 olume Semiconductor Manufacturing/Hakaru Mizoguchi（GIGAPHOTON INC.）
DTSTART;VALUE=DATE-TIME:20191210T070000Z
DTEND;VALUE=DATE-TIME:20191210T073000Z
DTSTAMP;VALUE=DATE-TIME:20210424T171903Z
UID:indico-contribution-93-1993@conference-indico.kek.jp
DESCRIPTION:https://conference-indico.kek.jp/event/93/contributions/1993/
LOCATION: NEXT1
URL:https://conference-indico.kek.jp/event/93/contributions/1993/
END:VEVENT
BEGIN:VEVENT
SUMMARY:【Keynote】Trend of Leading-Edge Semiconductors and the Patterni
 ng Technologies/Soichi Inoue（KIOXIA）
DTSTART;VALUE=DATE-TIME:20191210T045000Z
DTEND;VALUE=DATE-TIME:20191210T053000Z
DTSTAMP;VALUE=DATE-TIME:20210424T171903Z
UID:indico-contribution-93-1998@conference-indico.kek.jp
DESCRIPTION:https://conference-indico.kek.jp/event/93/contributions/1998/
LOCATION: NEXT1
URL:https://conference-indico.kek.jp/event/93/contributions/1998/
END:VEVENT
BEGIN:VEVENT
SUMMARY:【Keynote】R&D on new lasers with unexplored wavelengths aiming 
 at idustrial application/Tadatake Sato（AIST）
DTSTART;VALUE=DATE-TIME:20191210T041000Z
DTEND;VALUE=DATE-TIME:20191210T045000Z
DTSTAMP;VALUE=DATE-TIME:20210424T171903Z
UID:indico-contribution-93-1999@conference-indico.kek.jp
DESCRIPTION:https://conference-indico.kek.jp/event/93/contributions/1999/
LOCATION: NEXT1
URL:https://conference-indico.kek.jp/event/93/contributions/1999/
END:VEVENT
END:VCALENDAR