7th EUV-FEL Workshop

Name: 7th EUV-FEL Workshop
Start: 2023-01-30T13:00:00+09:00
End: 2023-01-30T17:00:00+09:00
Location: KEK

30 January 2023

KEK

Asia/Tokyo timezone

Current status and prospect of extreme ultraviolet resists

30 Jan 2023, 15:20

35m

Tsukuba Campus - Kobayashi Hall (Kenkyu-Honkan Building) (KEK)

1-1 Oho Tsukuba, Ibaraki 　305-0801 Japan.

Takahiro Kozawa (Osaka University)

Kozawa_Abstract.pdf

Kozawa_Presentation.pdf