7th EUV-FEL Workshop

Name: 7th EUV-FEL Workshop
Start: 2023-01-30T13:00:00+09:00
End: 2023-01-30T17:00:00+09:00
Location: KEK

30 January 2023

KEK

Asia/Tokyo timezone

TEL's Patterning Approaches Toward High NA EUV Lithography

30 Jan 2023, 15:55

35m

Tsukuba Campus - Kobayashi Hall (Kenkyu-Honkan Building) (KEK)

1-1 Oho Tsukuba, Ibaraki 　305-0801 Japan.

Seiji Nagahara (Tokyo Electron Ltd.)

Nagahara_Abstract.pdf