9th EUV-FEL Workshop

Tuesday Feb 4, 2025, 1:00 PM → 5:00 PM Asia/Tokyo

Royal Blue Hall (Tokyo Tech Front (Kuramae Kaikan), Institute of Science Tokyo)

Hiroshi Kawata (KEK)

We are pleased to announce that the 9th EUV-FEL Workshop will be held as a hybrid event at the Royal Blue Hall in Kuramae Kaikan, Institute of Science Tokyo, Ookayama Campus (formerly Tokyo Institute of Technology, Ookayama Campus) on the afternoon of Tuesday, February 4, 2025.

 

In the field of cutting-edge semiconductor development, the trial operation of High-NA EUV lithography systems has begun globally. In Japan, financial support for mass production of next-generation semiconductors is expanding, and efforts are being made to foster advanced and critical technologies. From the perspective of sustainability, the demand for energy efficiency is also becoming increasingly urgent. In light of these trends, we are currently planning the workshop program and inviting prominent speakers leading these fields.

 

Date and time: Tuesday, February 4, 2025, 13:00-17:00 (JST)

Workshop Site: Royal Blue Hall in Kuramae Kaikan, Institute of Science Tokyo

https://www.isct.ac.jp/en/001/about/campuses-and-offices/ookayama

Hybrid platform: Zoom

Participation capacity: ONSITE: ~100, ONLINE: 300

Participation fee: Free

 

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Sunao Ishihara
Representative of EUV-FEL Light Source Study Group for Industrialization

Hiroshi Kawata
High Energy Accelerator Research Organization, Innovation Center for Applied Superconducting Accelerator (iCASA)
 

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This workshop is supported by funding based on "KEK Donation Programs".

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