We are pleased to announce that the 11th EUV-FEL Workshop will be held at the Akihabara UDX Gallery Next / Conference NEXT1 on January 25th, 2027.
In the recent development of cutting-edge semiconductors, high-NA EUV exposure systems have been in operation globally. The light source of EUV-FEL for the future advanced lithography is also becoming as a stage of an on-going project not just a dream by the effort of xLight in US and KEK in Japan.
In case of EUV-FEL, the wavelength tunability is a great point for the future advanced lithography, so that Beyond EUV (Blue-X) will be focused on the present workshop. Prof. Vivek Bakshi, who is the leader of Blue-X workshop, and Prof. Takeo Watanabe will present the key-note lecture about the Beyond EUV realization, including the related problems to be solved. Another topic is that this fiscal year is the 40th anniversary of EUV lithography, which is demonstrated by Prof. Hiroo Kinoshita. Therefore, the special lecture by Prof. Kinoshita will be organized in this workshop.
We are in the process of finalizing the workshop program and inviting speakers. Details will be announced soon. Currently, we are providing preliminary information regarding the date and venue, and we kindly ask you to mark your calendars. Furthermore, given that specific development projects have now commenced, we plan to hold a networking reception at the venue immediately following the Workshop.
We look forward to your participation!
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Workshop date and time: Monday, January 25th, 2027, 10:30-16:40 JST
Workshop site: Akihabara UDX Gallery Next / Conference NEXT1
Platform: Onsite and Zoom
Participation capacity: onsite 100 attendees, online 300 attendees
Participation fee: Free
Networking Event date and time: Monday, January 25th, 2027, 17:00 - 19:00 JST
Networking Event site: Akihabara UDX Gallery Next / Conference NEXT2
Reception fee: 5,000 JPY (Payable in cash on-site)
*Cancellation will not be accepted after January 15th*
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Sunao Ishihara
Representative of EUV-FEL Light Source Study Group for Industrialization
Hiroshi Kawata
High Energy Accelerator Research Organization, Innovation Center for Applied Superconducting Accelerator (iCASA)