Speaker
Keita Fukushima
(AEC)
Description
"Cooling water leakage occurred in the vacuum chamber of an ECR ion source. It has
taken plenty of time to determine the cause of the pressure increase and realize the
cooling-water leakage in the vacuum chamber, because there were a lot of possibility to
cause the pressure increase, such as a vacuum leak from air and the gas lines. The delay
time to realize the water leakage led to spreading damage. We totally took three weeks
to recover the performance of the ECR ion source. In this trouble, we confirmed that, to
reduce the damage caused by the water leakage in the vacuum chamber, we need to
develop a method to notice the water leakage by using a quadrupole mass spectrometer."
