6th EUV-FEL Workshop
Tuesday, January 18, 2022 -
12:00 PM
Monday, January 17, 2022
Tuesday, January 18, 2022
1:00 PM
Opening remarks
-
Sunao Ishihara (Representative of EUV-FEL Light Source Study Group for Industrialization)
(
Representative of EUV-FEL Light Source Study Group for Industrialization
)
Opening remarks
Sunao Ishihara (Representative of EUV-FEL Light Source Study Group for Industrialization)
(
Representative of EUV-FEL Light Source Study Group for Industrialization
)
1:00 PM - 1:10 PM
1:10 PM
key note lecture (1) Semiconductor Industries: Creating the opportunities for the bright future in Japan
-
Tetsuro Higashi (TEL, SEMI, and TIA)
(
TEL, SEMI, and TIA
)
key note lecture (1) Semiconductor Industries: Creating the opportunities for the bright future in Japan
Tetsuro Higashi (TEL, SEMI, and TIA)
(
TEL, SEMI, and TIA
)
1:10 PM - 1:50 PM
1:50 PM
key note lecture (2) Future Semiconductor Manufacturing Technology for Ultra-Smart Society
-
Atsuyoshi Koike (Western Digital Japan)
(
Western Digital Japan
)
key note lecture (2) Future Semiconductor Manufacturing Technology for Ultra-Smart Society
Atsuyoshi Koike (Western Digital Japan)
(
Western Digital Japan
)
1:50 PM - 2:30 PM
2:30 PM
Invited speaker (1) The recent progress of SSMB EUV light source project at Tsinghua University
-
Zhilong Pan (Tsinghua University)
(
Tsinghua University
)
Invited speaker (1) The recent progress of SSMB EUV light source project at Tsinghua University
Zhilong Pan (Tsinghua University)
(
Tsinghua University
)
2:30 PM - 3:00 PM
3:00 PM
Break
Break
3:00 PM - 3:20 PM
3:20 PM
Invited speaker (2) Challenge of attenuated phase shift mask for EUV lithography
-
Tsutomu Shoki (HOYA)
(
HOYA
)
Invited speaker (2) Challenge of attenuated phase shift mask for EUV lithography
Tsutomu Shoki (HOYA)
(
HOYA
)
3:20 PM - 3:50 PM
3:50 PM
Invited speaker (3) Progress of DUV・EUV Light Source and its Extension to Leading Edge Semiconductor Manufacturing
-
Hakaru Mizoguchi (Gigaphoton)
Invited speaker (3) Progress of DUV・EUV Light Source and its Extension to Leading Edge Semiconductor Manufacturing
Hakaru Mizoguchi (Gigaphoton)
3:50 PM - 4:20 PM
4:20 PM
Invited speaker (4) Demonstration of Proof-of-Concept of EUV and Beyond EUV FELs for Future Lithography
-
Norio Nakamura (KEK)
(
KEK
)
Invited speaker (4) Demonstration of Proof-of-Concept of EUV and Beyond EUV FELs for Future Lithography
Norio Nakamura (KEK)
(
KEK
)
4:20 PM - 4:50 PM
4:50 PM
Closing address
-
Shin-ichi Adachi (KEK Executive Director)
Closing address
Shin-ichi Adachi (KEK Executive Director)
4:50 PM - 4:55 PM
4:55 PM
Statistic & Photo-session
-
Hiroshi Kawata (KEK)
Statistic & Photo-session
Hiroshi Kawata (KEK)
4:55 PM - 5:00 PM