6th EUV-FEL Workshop

Name: 6th EUV-FEL Workshop
Start: 2022-01-18T12:00:00+09:00
End: 2022-01-18T17:00:00+09:00
Location: No location set

18 January 2022

Asia/Tokyo timezone

Invited speaker (2) Challenge of attenuated phase shift mask for EUV lithography

18 Jan 2022, 15:20

30m

Tsutomu Shoki (HOYA) (HOYA)

Tsutomu Shoki.pdf