6th EUV-FEL Workshop

Name: 6th EUV-FEL Workshop
Start: 2022-01-18T12:00:00+09:00
End: 2022-01-18T17:00:00+09:00
Location: No location set

January 18, 2022

Asia/Tokyo timezone

Invited speaker (2) Challenge of attenuated phase shift mask for EUV lithography

Jan 18, 2022, 3:20 PM

30m

Tsutomu Shoki (HOYA) (HOYA)

Tsutomu Shoki.pdf