6th EUV-FEL Workshop

Name: 6th EUV-FEL Workshop
Start: 2022-01-18T12:00:00+09:00
End: 2022-01-18T17:00:00+09:00
Location: No location set

January 18, 2022

Asia/Tokyo timezone

Invited speaker (4) Demonstration of Proof-of-Concept of EUV and Beyond EUV FELs for Future Lithography

Jan 18, 2022, 4:20 PM

30m

Norio Nakamura (KEK) (KEK)

Norio Nakamura.pdf