7th EUV-FEL Workshop

Tsukuba Campus - Kobayashi Hall (Kenkyu-Honkan Building) (KEK)

Tsukuba Campus - Kobayashi Hall (Kenkyu-Honkan Building)


1-1 Oho Tsukuba, Ibaraki  305-0801 Japan.
Hiroshi KAWATA (KEK)

Announcement of the 7th EUV-FEL Workshop!

Utilization of IoT, AI and related technologies, information processing devices and systems are evolving towards an ultra-smart society. To this end, EUV exposure technology has been introduced in leading-edge semiconductor chip production.          

If we scope future EUV lithography technologies such as high NA EUV lithography exposure system, it is important to increase the EUV light source power to reduce the stochastic effect by means of the shot noise and also to take into account reducing the production cost in order to keep Sustainable Semiconductor Technology and Science. Indeed, in the IRDS report of 2022 on Lithography, both are described for future lithography (https://irds.ieee.org/editions/2022/irds%E2%84%A2-2022-lithography). Furthermore, there is another description of Beyond EUVL in a roadmap timetable in the report. These challenges may be solved by EUV-FEL which is a high-power and wavelength-tunable EUV light source.

The workshop will be held in the afternoon on 30 January 2023 as an international meeting in English. The workshop site will be both at Kobayashi-hall in KEK and on Zoom system.    Dr. Harry Levinson (HJL Lithography) will give a keynote lectures about “Free-electron lasers and the future of EUV lithography”.  In addition, the other invited speakers are Prof. Takeo Watanabe (University of Hyogo), Prof. Takahiro Kozawa (Osaka University), Dr. Seiji Nagahara (Tokyo Electron Ltd.) and Prof. Norio Nakamura (KEK).     
After the scientific session, we will have a site tour at cERL (compact Energy Recovery Linac) and STF (Superconducting RF Test Facility) in KEK, so that you can look at the real accelerator test facilities towards to the EUV-FEL.         

We hope that many people will participate and discuss on high-power EUV light sources for the future at the meeting.    

Sunao Ishihara
Representative of EUV-FEL Light Source Industrialization Study Group for Industrialization 

Hiroshi Kawata
High Energy Accelerator Research Organization, Innovation Center for Applied Superconducting Accelerator (iCASA)


This workshop is supported by funding based on "KEK Donation Programs".