10th EUV-FEL Workshop

Contribution List

1. Openning Remarks

Sunao Ishihara (Representative of EUV-FEL Light Source Study Group for Industrialization) 13:10-13:20

28/01/2026, 13:10

2. Greeting

Akira Henda (MEXT)

28/01/2026, 13:20

3. Target of the workshop

Hiroshi Kawata (Secretary of the workshop, KEK)

28/01/2026, 13:25

4. 【Key-note Lecture】Development of Next-Generation Semiconductor Process Technologies for EUV and BEUV under Japan’s “K Program” by JST

Junji Yumoto (The University of Tokyo)

28/01/2026, 13:35

12. 【Key-note Lecture】Reviving Moore’s Law with an EUV FEL

Nicholas Kelez (xLight Inc. , CEO & CTO)

28/01/2026, 14:15

6. 【Invited Talk】The Vast Light Source

Yosuke Honda (Accelerator Laboratory, KEK)

28/01/2026, 15:25

7. 【Invited Talk】Development of Multilayer Mirrors for BEUV Reflective Optics -Current Status of an Ongoing Project-

Takeo Ejima (Tohoku University)

28/01/2026, 16:05

8. Closing address

Shinichi Adachi (Executive Director, KEK)

28/01/2026, 16:45

9. Photo-session

28/01/2026, 16:50

11. 【Key-note Lecture】Reviving Moore’s Law with an EUV FEL

Nicholas Kelez (xLight Inc. , CEO & CTO)

10. 【Key-note Lecture】TBA

Nicholas Kelez (xLight Inc. , CEO & CTO)