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We are pleased to announce that the 10th EUV-FEL Workshop will be held at the Akihabara UDX Gallery Next / Conference NEXT1 on January 28th, 2026.
In the recent development of cutting-edge semiconductors, high-NA EUV exposure systems have been in operation globally. Domestically, the development project for "next-generation semiconductor microfabrication process technology" under the government-led "Key and advanced technology R&D through cross community collaboration program" has been advancing since April 2025. Among these projects, is the EUV-FEL fundamental technology development project, which KEK has been studying for many years, was selected and its development research is progressing steadily.
At this workshop, Professor Junji Yumoto, the program director, will deliver a keynote speech outlining the overall picture of the program and expectations for EUV-FEL. In addition, Dr. Nicholas Kelez, CEO and CTO of xLight, a US company that advancing efforts like KEK's to manufacture FEL light sources using accelerator technology, will also deliver another keynote speech about their progress. We are in the process of finalizing the workshop program and inviting speakers. Details will be announced later, so please stay tuned. Currently, we are providing preliminary information regarding the date and venue, and we kindly ask you to mark your calendars. Furthermore, given that specific development projects have now commenced, we plan to hold a networking reception at the venue immediately following the Workshop.
We look forward to your participation!
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Workshop date and time: Wednesday, January 28th, 2026, 13:00-17:00 JST
Workshop site: Akihabara UDX Gallery Next / Conference NEXT1
Platform: Onsite and Zoom
Participation capacity: onsite 100 attendees, online 300 attendees
Participation fee: Free
Networking event date and time: Wednesday, January 28th, 2026, 17:30 - 19:30 JST
Networking site: Akihabara UDX Gallery Next / Conference NEXT2
Reception fee: 5,000 JPY (Payable in cash on-site)
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Sunao Ishihara
Representative of EUV-FEL Light Source Study Group for Industrialization
Hiroshi Kawata
High Energy Accelerator Research Organization, Innovation Center for Applied Superconducting Accelerator (iCASA)