5th EUV-FEL Workshop

Fundamental Research to Solve the EUV Technical Issues, and Future Prospect for EUVL toward Advanced Devices Fabrication

22 Jan 2021, 12:40

40m

KEK

Speaker

Takeo Watanabe(Center for EUVL, Director, Laboratory of Advanced Science and Technology for Industry, Dean, University of Hyogo)

Presentation materials

Abstract_Takeo Watanabe(Univ of Hyogo).pdf

Presentation_Takeo Watanabe(Univ of Hyogo).pdf