5th EUV-FEL Workshop

Name: 5th EUV-FEL Workshop
Start: 2021-01-22T12:30:00+09:00
End: 2021-01-22T17:00:00+09:00
Location: KEK

22 January 2021

KEK

Asia/Tokyo timezone

Compact Storage Ring FEL: a kW-scale EUV lithography source

22 Jan 2021, 13:20

30m

KEK

1-1 Oho, Tsukuba, Ibaraki 305-0801, Japan

Rod Loewen(Lyncean Technologies, Inc., (CTO))