5th EUV-FEL Workshop

Name: 5th EUV-FEL Workshop
Start: 2021-01-22T12:30:00+09:00
End: 2021-01-22T17:00:00+09:00
Location: KEK

22 January 2021

KEK

Asia/Tokyo timezone

High-NA EUV Lithography exposure tool for EUV roadmap extension

22 Jan 2021, 16:20

30m

KEK

1-1 Oho, Tsukuba, Ibaraki 305-0801, Japan

Jan van Schoot et al.(ASML)