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8th EUV-FEL Workshop
29 January 2024
Asia/Tokyo timezone
Announcement of the 8th EUV-FEL Workshop!
Overview
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Poster
Contact
8th-euv-fel@ml.post.kek.jp
The current status and difficulties in manufacturing multilayer mirrors for BEUV lithography
29 Jan 2024, 15:50
30m
Speaker
Dr. Hisataka Takenaka (TOYAMA Co., Ltd.)
Presentation materials
Abstract_Hisataka Takenaka.pdf
Presentation_Takenaka.pdf
