8th EUV-FEL Workshop
Utilization of IoT, AI and related technologies, information processing devices and systems are evolving towards an ultra-smart society. To this end, EUV exposure technology has been introduced to the forefront of semiconductor chip production.
If we scope the future of EUV lithography technologies such as high NA EUV lithography exposure system, it is important to increase the EUV light source power to reduce the stochastic effect, and to achieve polarized light in order to ensure optimal contrast for high NA exposure system. Additionally, a wavelength tunable EUV light source, a crucial element for realizing Beyond EUVL, is essential in the long term. In this regard, the EUV-FEL light source emerges as one of the most promising candidates.
We are delighted to report recent developments, including the commencement of the construction of an advanced semiconductor chip fabrication facility by the Japanese company Rapidus Corporation, as well as the establishment of xLight, Inc. in the USA, dedicated to the development of an accelerator-based light source for lithography.
The workshop will be held at the afternoon of January 29, 2024, and will be conducted in English as an international gathering. The event will take place at two locations: NEXT-1/UDX in Tokyo and the Zoom platform virtually.
Dr. Kazunari Ishimaru, representing Rapidus Corporation, will deliver a keynote lecture on the "The Future of Semiconductor Manufacturing: New Developments in Speed and Innovation. " Additionally, we are honored to feature distinguished invited speakers, including Dr. Erik R. Hosler, CEO of xLight, Inc., Prof. Shinichiro Michizono from KEK, Dr. Patrick P. Naulleau, CEO of EUV Tech Inc., Dr. Hisataka Takenaka from TOYAMA Co., Ltd., and Prof. Hakaru Mizoguchi from Kyushu University, who will present their respective invited talks.
We hope that you will participate and discuss on high-power EUV light sources for the future at this meeting.
Sunao Ishihara
Representative of EUV-FEL Light Source Study Group for Industrialization
Hiroshi Kawata
High Energy Accelerator Research Organization, Innovation Center for Applied Superconducting Accelerator (iCASA)
This workshop is supported by funding based on "KEK Donation Programs".
Akira Sasaki
Akira Yoshida
Akiyoshi Suzuki
aoqi zhu
Atsuko Irie
Atsushi Ueguri
AZEEZ OLUWAGBENGA OSENI
Blair Haydon
Chao Chang
Chia-Hsiang Chen
Chiaki Sato
Christoph Quitmann
Cong Que DINH
DAISUKE BIZEN
Daniel Brown
Daniel Trompetter
Dennis Clark
Dongxiao Fan
Duan Gu
Eiichi Nomura
EIICHI TANAKA
Eiji Kako
Erik Hosler
Gennady Stupakov
Hai Zhu
Hakaru Mizoguchi
Harry Levinson
Hayato Ito
HIDEAKI FUTAGAMI
Hideki Yamamoto
Hidenori Watanabe
Hideo Aoki
Hikari Tomori
Hiroaki Ammo
Hiroki Yamamoto
Hiromichi Fujii
Hiromu Arisaka
hiroo kinoshita
Hiroshi Hara
Hiroshi KAWATA
Hiroshi Sakai
Hiroshi Yoshino
Hiroyoshi Kubo
HIROYUKI ISOBE
Hiroyuki SHIDARA
Hisataka Takenaka
Hisatsune Watanabe
Hitomi Kusama
Hitoshi Hayano
Howard Johnson
hry suzuki
Ichiro Mori
Igor Fomenkov
Imei Cho
Isamu Hanyu
Jang-Hui Han
Jerome Knappett
Jiayi Sun
Jiuqing WANG
Jos Benschop
Julius Joseph Santillan
Jun Hasegawa
Junichi Seki
Junji Iwasa
Kanji Sugino
kaoru taketani
Katsuhiko Murakami
Katsumasa Ikematsu
Katsumi Endo
Katsunobu Nishihara
Katsuya Hirota
Kayoko Cho
Kazuaki Suzuki
kazuki Yoshikawa
Kazumasa Okamoto
Kazunari Ishimaru
Kazunori Seki
Kazuo Sakamoto
kazuya aoki
Kazuyuki Nigorikawa
Kazuyuki Suko
Keisuke Fugane
Ken Takayama
Kenji Endo
Kimichika Tsuchiya
kiyohiko Nohara
Kiyokazu Sato
kobayashi daigo
Kohei Yoshimoto
Kohji Abe
Koji Asakawa
Koji Kasuga
Koki Uchimaru
Kosuke Sato
Kouji Kuramoto
Kunihiko Kasama
Lars Lohmann
Lee Yeung
Lianjia Wu
LU PEI
Maekawa Hiroyuki
Makoto Kaneko
Mariko Isono
Masaharu Nishikino
Masahiko Ishino
Masahiro Aoyagi
Masahiro Katoh
Masahiro Seyama
Masahiro Yamamoto
Masakazu Kurata
Masakazu Washio
Masaki Kando
Masaki Yamabe
Masanobu Ezaki
MASANOBU FUJISAWA
Masanori Matsuoka
Masashi Degawa
Masashi Tanaka
Masato Shibuya
Masatoshi Hatayama
Masatsugu Kamiura
Mayumi Yamashita
MICHIYO OKA
Miho Shimada
Mikio Kadoi
Ming-Hsun Tsai
Mitsunori Toyoda
Morihisa Hoga
Nao HIGASHI
Naoshi BABA
Naoya Hayashi
nobumichi fuchigami
Nobuyuki Shigeoka
Nobuyuki Yoshioka
Norihiro Sei
Norihito Fukugami
Norihito Kuno
Norio Nakamura
Omez Mesina
Osamu Yushiro
Patrick Naulleau
Rie Sumiya
Rui Zhang
Ryo Takebe
Ryoichi Hajima
Ryugo Hikichi
Ryukou Kato
S KATO
Satomi Takahashi
Satoshi ICHIMARU
Satoshi Shindo
Satoshi Suitoh
SEIICHI TAGAWA
Seiji Nagahara
shibuya takashi
Shingo Watanabe
SHINGO YOSHIKAWA
Shinichi Namba
Shinichiro Michizono
Shinji Matsui
Shinji Okazaki
Shinji Yamaguchi
shinya ishii
shinya ishii
Shinya Koshihara
Shoji Hotta
Shuhei Sato
Shuji Miyamoto
Shunsuke Nozawa
Shusuke Yoshitake
Soichi Inoue
Sojeong Lee
Stanley Gu
Sunao Ishihara
Tadashi Koseki
Takaaki Watanabe
Takahiro Kozawa
Takahiro Machida
Takanori Tanikawa
Takashi OBINA
Takayuki Saeki
Takayuki Uchiyama
Takeo Ejima
Takeo Matsuki
TAKEO WATANABE
Takeshi Higashiguchi
TAKUYA KONO
Tastuo Chijimatsu
Tetsuo Harada
Tetsushi Hara
Tetsuyuki Muramatsu
Thanh Hung DINH
Tomohiro Yamada
TORU FUJIMORI
Toshiji Suzuki
Toshio Konishi
Toshiro Itani
Toshiyuki Horiuchi
Toyohiro Chikyow
TSUKASA ABE
Tsukasa Sugiura
Tsung-Chi Yu
Tsutomu Shoki
Vivek Bakshi
Weiqing Zhang
Will Schumaker
XIAOBAO SONG
xiaolong wang
xijie wang
Yasuji Noyori
Yasuko Saito
Yasunao Yokota
YASUO ARAI
YASUO SASAKI
Yasushi Okubo
YASUTAKA MORIKAWA
yoichi minami
Yoshihisa Okubo
Yoshinori Kojima
Yoshio Suzuki
Yosuke Honda
Yuichiro Kawabata
Yuichiro Oguchi
Yuji Sano
Yuji Tanaka
Yukihide Kamiya
Yukiko Kitano
Yuma Onishi
Yutaka Nabeshima
Yutaka Nagasawa
YUTAKA NAKAGAWA
Zenggong Jiang
zhang zhiwei
Zhirong Huang
橋本 秀宏
真一 小川
