8th EUV-FEL Workshop

Plasma Dynamics and Future of LPP-EUV Source for Semiconductor Manufacturing

29 Jan 2024, 16:20

30m

Speaker

Prof. Hakaru Mizoguchi et al. (Quantum and Photonics Technology Research Center, Kyushu University)

Presentation materials

Abstract_Hakaru Mizoguchi, et al..pdf

Presentation_Mizoguchi.pdf